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Brooks Automation: ATM-205-1-S


Brooks Automation
ATM-205-1-S


Manufacturer Brooks Automation
Model/Part # ATM-205-1-S
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Description

Atmospheric Top Mount 3-axis Brooks PRI Equipe ATM205 Robot - One or Two Vacuum Lines (for Single/Dual End-Effectors) - HAMA Wafer Sensor Option -"SEMI S2-93" Standard Option - 5.25" Arm Link w/ 10" Z-Stroke

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