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Brooks Automation: ATM-107-1-S-CE


Brooks Automation
ATM-107-1-S-CE


Manufacturer Brooks Automation
Model/Part # ATM-107-1-S-CE
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Description

Atmospheric Top Mount 3-axis Brooks PRI Equipe ATM107 Robot - One or Two Vacuum Lines (for Single/Dual End-Effectors) - HAMA Wafer Sensor Option - "SEMI S2-93" Standard Option - 7.2" Arm Link w/ 7.1" Z-Stroke - "B" Series (Wide Arm) available

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